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Journal description
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Details for article 13 of 70 found articles
| Title: |
Crystallinity Evaluation and Dislocation Observation for an Aluminum Nitride Single-Crystal Substrate on a Wafer Scale |
| Author: |
Yao, Yongzhao Sugawara, Yoshihiro Ishikawa, Yukari Okada, Narihito Tadatomo, Kazuyuki |
| Appeared in: |
Journal of electronic materials |
| Paging: | Volume 49 () nr. 9 pages 5144-5153 |
| Year: |
2020-02-28 |
| Contents: | |
| Publisher: |
Springer US, New York |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 13 of 70 found articles
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