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Details for article 4 of 70 found articles
| Title: |
Analysis by HR-STEM of the Strain Generation in InP after SiNx Deposition and ICP Etching |
| Author: |
Gutiérrez, M. Reyes, D. F. Araujo, D. Landesman, J. P. Pargon, E. |
| Appeared in: |
Journal of electronic materials |
| Paging: | Volume 49 () nr. 9 pages 5226-5231 |
| Year: |
2020-07-15 |
| Contents: | |
| Publisher: |
Springer US, New York |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 4 of 70 found articles
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